Mass Fabrication of Micro/Nano Dual-scale Structures and its Applications in Energy Harvesting
Haixia (Alice) Zhang
Institute of Microelectronics, Peking University, China
This talk will introduce a top-down method to make mass production of micro/nano dual-scale structures. Well-designed microstructures are fabricated by normal micro fabrication process, while nanostructures are formed by following improved etching and growing process to realize micro-nano dual structures. By combining the uniformed microstructures and nanostructures on the same surface, these MNDS structures have the unique properties, such as anti-reflectivity, super-hydrophobicity and super-high-density. The relationship of MNDS and its properties will be studied and analyzed by a novel method, 3D SEM reconstruction software, which is developed by the author’s group, which can read cross-scale SEM photo into digital data and form the solid model for simulation automatically. Finally, some examples of using these MNDS in energy harvesting, especially in triboelectric nanogenerator (TENG) will be demonstrated as a renewable, clean and usable power source for smart system.
Haixia(Alice) Zhang, Professor, Institute of Microelectronics, Peking Universituy. She was served on the general chair of IEEE NEMS 2013 Conference, the organizing chair of Transducers’11. As the founder of the International Contest of Applications in Nano-Micro Technologies (iCAN), Dr. Zhang organized this world-wide event since 2007 till now. She was elected the director of Integrated Micro/Nano System Engineering Center in 2006, the deputy secretary-general of Chinese Society of Micro-Nano Technology in 2005, the Co-chair of Chinese International NEMS Network (CINN) and serves as the chair of IEEE NTC Beijing Chapter. At 2006, Dr. Zhang won National Invention Award of Science & Technology. Her research fields include MEMS Design and Fabrication Technology, Energy harvesting and applications. Contact Email: email@example.com